High-accuracy position and orientation measurement of extended two-dimensional surfaces by a phase-sensitive vision method.
Fiche publication
Date publication
septembre 2002
Auteurs
Membres identifiés du Cancéropôle Est :
Dr SANDOZ Patrick
Tous les auteurs :
Sandoz P, Bonnans V, Gharbi T
Lien Pubmed
Résumé
We introduced recently phase measurements usually performed in interferometry to the domain of image processing and intelligent vision [IEEE Trans. Instrum. Meas. 49, 867 (2000)]. Our purpose is to sense with a high accuracy the position, orientation, and displacement of two-dimensional (2D) surfaces observed by a static vision system. We report on significant improvements of the method. Experimental measurements reveal a peak-valley noise of approximately 10(-2) CCD pixel, corresponding approximately to a 10(-3) period of the phase reference pattern. Then the observation of 10 microm scaled features enables an accuracy of a few nm in the position sensing of the phase reference pattern for the extended 2D measurement range.
Référence
Appl Opt. 2002 Sep 10;41(26):5503-11.